Miraial Foup-Front Opening Unified Pod 300mm Wafers KT-3003

Miraial Foup-Front Opening Unified Pod 300mm Wafers KT-3003

Key Specifications & Features

• Designed for 300 mm (12-inch) wafers. 

• Constructed by Miraial Co., Ltd., which specializes in high-precision moulded plastics for the semiconductor industry. 

• The FOUP holds up to 26 wafer slots (where the 26th slot is a dummy wafer used to protect the 25th actual wafer). 

• Meets a variety of industry standards: complies with SEMI standards including M31/E1.9/E47.1/E15.1/E57/E62. 

• All major components are made of conductive materials (in the E7–E10 conductivity range), making it suitable for clean-room semiconductor processing.

• Designed with features to maintain long-term dimensional accuracy and durability for reuse: high-function plastics and modular replaceable parts. 

• Enhanced contamination control design: uses redundant lid gaskets to prevent particle ingress, and a round latch design to reduce opening area around the key and minimize internal particle ejection.

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